Controlled amplification of quality factor in n-doped silicon micromechanical bulk mode resonators by thermodynamic feedback

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review

View graph of relations

Author(s)

Related Research Unit(s)

Detail(s)

Original languageEnglish
Publication statusPublished - 29 Jun 2014

Conference

Title7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies (APCOT 2014)
PlaceKorea, Republic of
CityDaegu
Period29 June - 2 July 2014

Citation Format(s)

Controlled amplification of quality factor in n-doped silicon micromechanical bulk mode resonators by thermodynamic feedback. / ZHU, Haoshen; TU, Cheng; LEE, Joshua E.-Y.
2014. Paper presented at 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea, Republic of.

Research output: Conference PapersRGC 32 - Refereed conference paper (without host publication)peer-review