PROPERTIES OF TITANIUM NITRIDE FILMS DEPOSITED USING VACUUM ARC PLASMA SOURCE

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	56
Publication status	Published - Sept 2002
Event	13th International Conference on Ion Beam Modification of Materials - International Conference Centre Kobe, Kobe, Japan Duration: 1 Sept 2002 → 6 Sept 2002

Conference	13th International Conference on Ion Beam Modification of Materials
Abbreviated title	IBMM2002
Place	Japan
City	Kobe
Period	1/09/02 → 6/09/02

Other Access Options

@conference{231b5a6ce57442d79e070044b3b2a805,

title = "PROPERTIES OF TITANIUM NITRIDE FILMS DEPOSITED USING VACUUM ARC PLASMA SOURCE",

author = "Li, \{L. H.\} and Tian, \{X. B.\} and Chu, \{P. K.\}",

year = "2002",

month = sep,

language = "English",

pages = "56",

note = "13th International Conference on Ion Beam Modification of Materials, IBMM2002 ; Conference date: 01-09-2002 Through 06-09-2002",

}