Properties of titanium nitride fabricated on stainless steel by plasma-based ion implantation/deposition

Plasma-based ion implantation (PBII) is a burgeoning surface treatment technique as it offers the possibility of treating complex-shaped and large samples without target manipulation. However, the technique has not been widely adopted in the metallurgical industry due to the difficulty to achieve a thick modified layer at low temperature. In this paper, we describe a method combining PBII and ion mixing to synthesize titanium nitride (TiN) on 304 stainless steel. Titanium and nitrogen ions are generated by a metal arc plasma source and hot filament glow discharge, respectively. By using three different sets of experimental conditions, we investigate the effects of different implantation and deposition parameters on the surface properties of TiN. Results from Auger electron spectroscopy, glancing X-ray diffraction, pin-on-disk test, and microhardness determination reveal significantly improved tribological properties. The enhancement is a consequence of the synergistic effects of the coexistence of titanium, oxygen, and nitrogen, as well as the ion mixed interface. © 2000 Elsevier Science S.A.