PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

View graph of relations

Author(s)

Detail(s)

Original languageEnglish
Title of host publicationProceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
EditorsA Benninghoven, C A Evans, K D McKeegan, H A Storms, H W Werner
PublisherJohn Wiley & Sons
Pages487-490
Publication statusPublished - Sept 1989
Externally publishedYes

Conference

Title7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
LocationHyatt Regency Hotel
PlaceUnited States
CityMonterey
Period3 - 8 September 1989

Citation Format(s)

PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS. / Makovsky, J. ; Goldstein, M. ; CHU, P.
Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). ed. / A Benninghoven; C A Evans; K D McKeegan; H A Storms; H W Werner. John Wiley & Sons, 1989. p. 487-490.

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review