PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS

J.   Makovsky; M.   Goldstein; P. CHU

PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS

J. Makovsky
, M. Goldstein
, P. CHU

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
Editors	A Benninghoven, C A Evans, K D McKeegan, H A Storms, H W Werner
Publisher	John Wiley & Sons
Pages	487-490
Publication status	Published - Sept 1989
Externally published	Yes
Event	7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII) - Hyatt Regency Hotel, Monterey, United States Duration: 3 Sept 1989 → 8 Sept 1989

Conference

Conference	7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII)
Place	United States
City	Monterey
Period	3/09/89 → 8/09/89

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

Makovsky, J., Goldstein, M., & CHU, P. (1989). PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS. In A. Benninghoven, C. A. Evans, K. D. McKeegan, H. A. Storms, & H. W. Werner (Eds.), Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII) (pp. 487-490). John Wiley & Sons.

Makovsky, J. ; Goldstein, M. ; CHU, P. / PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS. Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). editor / A Benninghoven ; C A Evans ; K D McKeegan ; H A Storms ; H W Werner. John Wiley & Sons, 1989. pp. 487-490

@inproceedings{2ef1e8641edf43269e770fad064eeebf,

title = "PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS",

author = "J. Makovsky and M. Goldstein and P. CHU",

year = "1989",

month = sep,

language = "English",

pages = "487--490",

editor = "A Benninghoven and Evans, \{C A\} and McKeegan, \{K D\} and Storms, \{H A\} and Werner, \{H W\}",

booktitle = "Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)",

publisher = "John Wiley \& Sons",

address = "United States",

note = "7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII) ; Conference date: 03-09-1989 Through 08-09-1989",

}

Makovsky, J, Goldstein, M & CHU, P 1989, PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS. in A Benninghoven, CA Evans, KD McKeegan, HA Storms & HW Werner (eds), Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). John Wiley & Sons, pp. 487-490, 7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII), Monterey, California, United States, 3/09/89.

PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS. / Makovsky, J. ; Goldstein, M. ; CHU, P.
Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII). ed. / A Benninghoven; C A Evans; K D McKeegan; H A Storms; H W Werner. John Wiley & Sons, 1989. p. 487-490.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - PROGRESS IN THE ''LOAD LINE CALIBRATION METHOD'' METHOD FOR QUANTITATIVE DETERMINATION OF [O] IN SILICON BY SIMS

AU - Makovsky, J.

AU - Goldstein, M.

AU - CHU, P.

PY - 1989/9

Y1 - 1989/9

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 487

EP - 490

BT - Proceedings of the Seventh International Conference on Secondary Ion Mass Spectrometry (SIMS VII)

A2 - Benninghoven, A

A2 - Evans, C A

A2 - McKeegan, K D

A2 - Storms, H A

A2 - Werner, H W

PB - John Wiley & Sons

T2 - 7th International Conference on Secondary Ion Mass Spectrometry (SIMS VII)

Y2 - 3 September 1989 through 8 September 1989

ER -