Production of a-Si1-xCx : H powders using radiofrequency glow discharges of silane and methane mixtures

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)62_Review of books or of software (or similar publications/items)peer-review

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  • J. Costa
  • G. Viera
  • J. L. Andujar
  • E. Pascual
  • E. Bertran


Original languageEnglish
Pages (from-to)173-178
Journal / PublicationMaterials Research Society Symposium - Proceedings
Publication statusPublished - 1996
Externally publishedYes


Title1995 MRS Fall Meeting
PlaceUnited States
Period27 November - 1 December 1995


a-Si1-xCx:H powders have been produced in radiofrequency glow discharge of SiH4 and CH4. Samples produced in discharged with different gas flow ratios (R = [CH4]/ [SiH4]+[CH4], R approximately 0.2 to 0.95) were analyzed by several techniques: Infrared spectroscopy, transmission electron microscopy and thermal desorption spectrometry of hydrogen. The microstructural properties of the a-Si1-xCx:H powders obtained ranged between those previously reported in silicon particles and those of amorphous carbon particles. As a general rule, the particles, whose diameter ranged between 5 and 400 nm in diameter, showed an amorphous microstructure and high hydrogen content. Infrared spectroscopy showed that the hydrogen was mainly located on the particle surface and in microvoids forming CHi and/or SiHi (i = 2,3) groups. The hydrogen was removed from the powder by thermal annealing (1-xCx:H powders after this thermal treatment revealed new microstructural and optical features.