Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment
|Journal / Publication||Applied Physics A: Materials Science and Processing|
|Publication status||Published - Oct 2005|
|Link to Scopus||https://www.scopus.com/record/display.uri?eid=2-s2.0-23944512782&origin=recordpage|
X-ray diffraction, scanning electron microscopy, transmission electron microscopy, and high resolution transmission electron microscopy were used to study tin oxide thin films deposited on Si(100) substrates at room temperature using pulsed laser deposition techniques with a sintered cassiterite SnO 2 target and subsequently heat-treated. X-ray diffraction and scanning electron microscopy results demonstrated that the as-prepared thin films consisted of an amorphous matrix as well as plume-like features, which are shown many micropores. The thin films that were heat treated for 2 h at 150 °C had tetragonal rutile nanocrystalline SnO2 structures. The microstructural evolution of the tin oxide thin films during the heat treatment is discussed in the paper. © Springer-Verlag 2004.
Applied Physics A: Materials Science and Processing, Vol. 81, No. 5, 10.2005, p. 1073-1076.
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
Chen, ZW, Lai, JKL, Shek, CH & Chen, HD 2005, 'Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment', Applied Physics A: Materials Science and Processing, vol. 81, no. 5, pp. 1073-1076. https://doi.org/10.1007/s00339-004-2955-9
Chen, Z. W., Lai, J. K. L., Shek, C. H., & Chen, H. D. (2005). Production of amorphous tin oxide thin films and microstructural transformation induced by heat treatment. Applied Physics A: Materials Science and Processing, 81(5), 1073-1076. https://doi.org/10.1007/s00339-004-2955-9