Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry
- Cheng Tu
- , Joshua E.-Y. Lee
- , Astrid Frank
- , Christoph Schaffel
- , Uwe Stehr
- , Matthias Hein
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
2
Link opens in a new tab
Citations
(Scopus)