Preparation of ferroelectric Pb(Zr0.53Ti0.47)O3 thin film on YBa2Cu3O7-δ film by magnetron sputtering

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • W. G. Luo
  • A. L. Ding
  • X. T. Chen
  • R. T. Zhang
  • M. Ge

Detail(s)

Original languageEnglish
Pages (from-to)103-108
Journal / PublicationFerroelectrics
Volume152
Issue number1 -4 pt 2
Publication statusPublished - 1994
Externally publishedYes

Conference

TitleProceedings of the 8th International Meeting on Ferroelectricity (IMF-8). Part 2 (of 9)
CityGaithersburg, MD, USA
Period8 - 13 August 1993

Abstract

We have prepared epitaxial ferroelectric Pb(Zr0.53Ti0.47)O3/superconductive YBa2Cu3O7-δ heterostructures on single crystalline (100) SrTiO3 by in-situ RF magnetron sputtering from powder targets. The YBCO film was first deposited on 10×10mm (100) SrTiO3 substrate at 700°C. Then the PZT film was sputtered on epitaxial YBCO layer from a stoichiometric Pb(Zr0.53Ti0.47)O3 powder target. Only (001) peaks of PZT film are observed, showing that the PZT film can be epitaxially grown on the YBCO layer using in-situ RF magnetron sputtering from powder targets. A remanent polarization of 10μC/cm2 was obtained from the PZT/YBCO heterostructures. The coercive filed is about 90kV/cm.

Citation Format(s)

Preparation of ferroelectric Pb(Zr0.53Ti0.47)O3 thin film on YBa2Cu3O7-δ film by magnetron sputtering. / Luo, W. G.; Ding, A. L.; Chen, X. T.; Zhang, R. T.; Ge, M.; Chan, K. S.

In: Ferroelectrics, Vol. 152, No. 1 -4 pt 2, 1994, p. 103-108.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review