Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Silicon Material Science
100
Film Material Science
100
Chemical Vapor Depo... Material Science
100
Carbon Nitride Material Science
16
Diamond Material Science
16
Hot-Filament Chemic... Material Science
16
Amorphous Carbon Material Science
16
X-Ray Diffraction Material Science

Keyphrases

100
Chemical Vapor Depo... Keyphrases
100
Silicon Substrate Keyphrases
100
Carbon Nitride Film Keyphrases
100
Plasma-assisted Keyphrases
100
RF Plasma Keyphrases
100
Crystalline Carbon ... Keyphrases
50
Raman Scattering Keyphrases
50
Diffraction Peak Keyphrases
50
Hot Filament Chemic... Keyphrases
50
X Ray Diffraction Keyphrases
50
Bonding Structure Keyphrases
50
Amorphous Carbon Keyphrases
50
Si(111) Substrate Keyphrases
50
XPS Analysis Keyphrases
50
Concentration Ratio Keyphrases
50
Diamond Keyphrases
50
Graphite Carbon Keyphrases
50
C Concentration Keyphrases
50
C3N4 Keyphrases

INIS

100
films INIS
100
substrates INIS
100
silicon INIS
100
chemical vapor depo... INIS
100
carbon nitrides INIS
33
plasma INIS
16
peaks INIS
16
mixtures INIS
16
x-ray diffraction INIS
16
bonding INIS
16
raman effect INIS
16
carbon INIS
16
methane INIS
16
polycrystals INIS
16
ammonia INIS
16
xps INIS
16
diamonds INIS
16
graphite INIS
16
concentration ratio INIS
16
filaments INIS

Physics

100
Vapor Deposition Physics
100
Carbon Nitride Physics
100
Blood Plasma Physics
50
Methane Physics
50
Polycrystalline Physics
50
Raman Spectra Physics
50
XPS Analysis Physics
50
X Ray Diffraction Physics

Engineering

100
Chemical Vapor Depo... Engineering
100
Vapor Deposition Engineering
100
Silicon Substrate Engineering
100
Nitride Engineering
50
Methane Engineering
50
Diamond Engineering
50
Polycrystalline Engineering
50
Ray Diffraction Engineering
50
Bonding Structure Engineering
50
Concentration Ratio Engineering
50
Amorphous Carbon Engineering
50
Raman Spectra Engineering
Research OutputsResearch Output authored by Preparation of crystalline carbon nitride films on silicon substrate by chemical vapor deposition is tagged with the concept