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Preparation and electrical properties of (100) Preferred (Ba,Sr)TiO3 bilayer thin films derived from pulse laser deposition method

  • S. G. Lu
  • , Philip A. Friddle
  • , Z. K. Xu
  • , G. G. Siu
  • , Haydn Chen*
  • , K. H. Wong
  • , C. L. Mak
  • *Corresponding author for this work

    Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

    Abstract

    Bilayer Ba0.6Sr0.4TiO3 - Ba0.4Sr0.6TiO3 and Ba0.4Sr0.6TiO3 - Ba0.6Sr0.4TiO3 thin films were deposited on the LaNiO3-buffered Pt/Ti/SiO2/Si substrates using pulse laser deposition method. A (100) preferred orientation was obtained. The structure was characterized using x-ray diffraction (XRD) and Raman spectroscopy. The leakage current, and dielectric permittivity versus temperature were characterized. Results indicated that the (100) preferred bilayer structure had less leakage current and smaller loss tangent, which was in favor of enhancing the quality of thin film used as microwave dielectrics. © 2005 Trans Tech Publications Ltd. All Rights Reserved
    Original languageEnglish
    Pages (from-to)849-852
    JournalKey Engineering Materials
    Volume280-283
    DOIs
    Publication statusPublished - 2005

    Research Keywords

    • Barium strontium titanate
    • Preferred orientation
    • Pulse laser deposition
    • Thin film

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