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Precise assembly and electrical contact of MWCNT based on AC dielectrophoresis and robotic nanomanipulation technology

  • Xiaojun Tian
  • , Yuechao Wang
  • , Ning Xi
  • , Zaili Dong
  • , Peng Yu
  • , Lianqing Liu
  • , Wenjung Li

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

Nowadays research on single CNT based nanoeletronic device arises much interest among researchers, but in the fabrication of CNT based nanoeletronic device, one of the key technical problems is to realize precise assembly and electrical contact between CNT and microelectrode. For solving the problem, first AC dieletrophoresis (DEP) method is used to coarsely position batch of CNTs near the microelectrode, then AFM based robotic nanomanipulation method is used to precisely position, assembly and make electric contact of the selected CNT. MWCNT assembly and electric contact experiments verify the effectiveness of these two methods' integration. © 2006 IEEE.
Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages928-931
DOIs
Publication statusPublished - 2006
Externally publishedYes
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
PlaceChina
CityZhuhai
Period18/01/0621/01/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 9 - Industry, Innovation, and Infrastructure
    SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

  • AC DEP
  • Electrical contact
  • MWCNT
  • Precise assembly
  • Robotic nanomanipulation

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