Abstract
Nowadays research on single CNT based nanoeletronic device arises much interest among researchers, but in the fabrication of CNT based nanoeletronic device, one of the key technical problems is to realize precise assembly and electrical contact between CNT and microelectrode. For solving the problem, first AC dieletrophoresis (DEP) method is used to coarsely position batch of CNTs near the microelectrode, then AFM based robotic nanomanipulation method is used to precisely position, assembly and make electric contact of the selected CNT. MWCNT assembly and electric contact experiments verify the effectiveness of these two methods' integration. © 2006 IEEE.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS |
| Pages | 928-931 |
| DOIs | |
| Publication status | Published - 2006 |
| Externally published | Yes |
| Event | 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006 |
Conference
| Conference | 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS |
|---|---|
| Place | China |
| City | Zhuhai |
| Period | 18/01/06 → 21/01/06 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Research Keywords
- AC DEP
- Electrical contact
- MWCNT
- Precise assembly
- Robotic nanomanipulation
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