Power MEMS: An important category of MEMS

Siaw Kiang Chou; Kaili Zhang; Wenming Yang; Jun Li; Zhiwang Li

Power MEMS: An important category of MEMS

Siaw Kiang Chou
, Kaili Zhang
, Wenming Yang
, Jun Li
, Zhiwang Li

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 12 - Chapter in an edited book (Author) › peer-review

Abstract

As an important category of MEMS, power MEMS are defined as microsystems for power generation and energy conversion including propulsion and cooling. Power MEMS can be classified into micro thermodynamic machines including microturbines, miniature internal combustion engines and micro-coolers; solid-state direct energy conversion including thermoelectric and photovoltaic microstructures; micro electrochemical devices including micro fuel cells and nanostructure batteries; vibration energy harvesting devices including piezoelectric, magnetic or electrostatic micro generators, and micro thrusters for propulsion. This chapter will introduce extensively the micro thermophotovoltaic power generators, micro direct methanol fuel cells, solid propellant micro propulsion systems, and micro scale combustion. Then a brief introduction of other power MEMS systems will be given. Finally, some guidelines for future investigations are provided. © 2010 Nova Science Publishers, Inc. All rights reserved.

Original language	English
Title of host publication	Micro electro mechanical systems (MEMS)
Subtitle of host publication	technology, fabrication processes, and applications
Editors	Britt Ekwall, Mikkel Cronquist
Place of Publication	Hauppauge, N.Y.
Publisher	Nova Science Publishers
Pages	127-164
ISBN (Print)	9781608764747, 1608764745
Publication status	Published - Jan 2011

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Research Keywords

Power MEMS
Micro Thermophotovoltaic
Micro Direct Methanol Fuel Cell
Micro Propulsion Systems
Micro Scale Combustion

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@inbook{cf3df8878f6648068280a5fdea3bb8fd,

title = "Power MEMS: An important category of MEMS",

abstract = "As an important category of MEMS, power MEMS are defined as microsystems for power generation and energy conversion including propulsion and cooling. Power MEMS can be classified into micro thermodynamic machines including microturbines, miniature internal combustion engines and micro-coolers; solid-state direct energy conversion including thermoelectric and photovoltaic microstructures; micro electrochemical devices including micro fuel cells and nanostructure batteries; vibration energy harvesting devices including piezoelectric, magnetic or electrostatic micro generators, and micro thrusters for propulsion. This chapter will introduce extensively the micro thermophotovoltaic power generators, micro direct methanol fuel cells, solid propellant micro propulsion systems, and micro scale combustion. Then a brief introduction of other power MEMS systems will be given. Finally, some guidelines for future investigations are provided. {\textcopyright} 2010 Nova Science Publishers, Inc. All rights reserved.",

keywords = "Power MEMS, Micro Thermophotovoltaic, Micro Direct Methanol Fuel Cell, Micro Propulsion Systems, Micro Scale Combustion",

author = "Chou, \{Siaw Kiang\} and Kaili Zhang and Wenming Yang and Jun Li and Zhiwang Li",

year = "2011",

month = jan,

language = "English",

isbn = "9781608764747",

pages = "127--164",

editor = "Britt Ekwall and Mikkel Cronquist",

booktitle = "Micro electro mechanical systems (MEMS)",

publisher = "Nova Science Publishers",

address = "United States",

}

Power MEMS: An important category of MEMS. / Chou, Siaw Kiang; Zhang, Kaili; Yang, Wenming et al.
Micro electro mechanical systems (MEMS): technology, fabrication processes, and applications. ed. / Britt Ekwall; Mikkel Cronquist. Hauppauge, N.Y.: Nova Science Publishers, 2011. p. 127-164 3.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 12 - Chapter in an edited book (Author) › peer-review

TY - CHAP

T1 - Power MEMS

T2 - An important category of MEMS

AU - Chou, Siaw Kiang

AU - Zhang, Kaili

AU - Yang, Wenming

AU - Li, Jun

AU - Li, Zhiwang

PY - 2011/1

Y1 - 2011/1

N2 - As an important category of MEMS, power MEMS are defined as microsystems for power generation and energy conversion including propulsion and cooling. Power MEMS can be classified into micro thermodynamic machines including microturbines, miniature internal combustion engines and micro-coolers; solid-state direct energy conversion including thermoelectric and photovoltaic microstructures; micro electrochemical devices including micro fuel cells and nanostructure batteries; vibration energy harvesting devices including piezoelectric, magnetic or electrostatic micro generators, and micro thrusters for propulsion. This chapter will introduce extensively the micro thermophotovoltaic power generators, micro direct methanol fuel cells, solid propellant micro propulsion systems, and micro scale combustion. Then a brief introduction of other power MEMS systems will be given. Finally, some guidelines for future investigations are provided. © 2010 Nova Science Publishers, Inc. All rights reserved.

AB - As an important category of MEMS, power MEMS are defined as microsystems for power generation and energy conversion including propulsion and cooling. Power MEMS can be classified into micro thermodynamic machines including microturbines, miniature internal combustion engines and micro-coolers; solid-state direct energy conversion including thermoelectric and photovoltaic microstructures; micro electrochemical devices including micro fuel cells and nanostructure batteries; vibration energy harvesting devices including piezoelectric, magnetic or electrostatic micro generators, and micro thrusters for propulsion. This chapter will introduce extensively the micro thermophotovoltaic power generators, micro direct methanol fuel cells, solid propellant micro propulsion systems, and micro scale combustion. Then a brief introduction of other power MEMS systems will be given. Finally, some guidelines for future investigations are provided. © 2010 Nova Science Publishers, Inc. All rights reserved.

KW - Power MEMS

KW - Micro Thermophotovoltaic

KW - Micro Direct Methanol Fuel Cell

KW - Micro Propulsion Systems

KW - Micro Scale Combustion

UR - https://www.scopus.com/pages/publications/84895391286

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84895391286&origin=recordpage

M3 - RGC 12 - Chapter in an edited book (Author)

SN - 9781608764747

SN - 1608764745

SP - 127

EP - 164

BT - Micro electro mechanical systems (MEMS)

A2 - Ekwall, Britt

A2 - Cronquist, Mikkel

PB - Nova Science Publishers

CY - Hauppauge, N.Y.

ER -

Power MEMS: An important category of MEMS

Abstract

UN SDGs

Research Keywords

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