Porous AlN ceramic substrates by reaction sintering

A novel approach was undertaken in producing porous AlN microelectronics tapes with high thermal conductivity and low dielectric constant. This method essentially utilised polymer micro-spherical powders that were used as a sacrificial mould to introduce controlled porosity into the green tapes during pyrolysis. The Al₂O₃-rich porous green tapes were then reaction sintered at 1680°C for 12h to achieve porous AlN tapes. This work builds upon the previously developed novel reaction sintering process that densified and converted Al₂O₃-rich tapes (Al₂O₃-20wt.% AlN-5wt.% Y₂O₃) to AlN tapes at a relatively low sintering temperature of 1680°C. The sintering behaviour of the porous tapes was investigated, and the effects of the microspheres particle size and volume addition were studied. The microspheres successfully contributed to the significant reduction of tape density by porosity, and this contributed to lowering its dielectric constant. Dielectric constant of the AlN tapes were reduced to about 6.8-7.7 whilst thermal conductivity values were reasonable at about 46-60W/mK. Coefficient of thermal expansion (CTE) values showed a linear trend according to phase composition, with the porous A1N tapes exhibiting CTE values of (4.4-4.8) × 10^-6 °C^-1, showing good CTE compatibility with silicon, at 4.0 × 10^-6 °C^-1. The added porosity did not significantly affect the CTE values. © 2003 Elsevier B.V. All rights reserved.