Polymeric optical waveguides fabrication by direct write electron beam lithography
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
Author(s)
Related Research Unit(s)
Detail(s)
| Original language | English |
|---|---|
| Title of host publication | Nonlinear Guided Waves and Their Applications, NLGW 2001 |
| Publisher | Optica Publishing Group (formerly OSA) |
| Pages | 55-57 |
| ISBN (print) | 1557526702 |
| Publication status | Published - 2001 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|
Conference
| Title | Nonlinear Guided Waves and Their Applications, NLGW 2001 |
|---|---|
| Place | United States |
| City | Clearwater |
| Period | 26 March 2001 |
Link(s)
Abstract
Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31um and 1.55um, respectively.
Research Area(s)
Bibliographic Note
Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].
Citation Format(s)
Polymeric optical waveguides fabrication by direct write electron beam lithography. / Zhou, Jun; Wong, W. H.; Pun, E. Y.B.
Nonlinear Guided Waves and Their Applications, NLGW 2001. Optica Publishing Group (formerly OSA), 2001. p. 55-57 (Optics InfoBase Conference Papers).
Nonlinear Guided Waves and Their Applications, NLGW 2001. Optica Publishing Group (formerly OSA), 2001. p. 55-57 (Optics InfoBase Conference Papers).
Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review
