Polymeric optical waveguides fabrication by direct write electron beam lithography

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with host publication)peer-review

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Detail(s)

Original languageEnglish
Title of host publicationNonlinear Guided Waves and Their Applications, NLGW 2001
PublisherOptica Publishing Group (formerly OSA)
Pages55-57
ISBN (Print)1557526702
Publication statusPublished - 2001

Publication series

NameOptics InfoBase Conference Papers

Conference

TitleNonlinear Guided Waves and Their Applications, NLGW 2001
PlaceUnited States
CityClearwater
Period26 March 2001

Abstract

Rib-type single-mode channel waveguides using the polymer SU8C were fabricated by direct write electron beam lithography. The propagation loss of the channel waveguides was measured and found to be 0.22dB/cm and 0.48dB/cm at 1.31um and 1.55um, respectively.

Bibliographic Note

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Citation Format(s)

Polymeric optical waveguides fabrication by direct write electron beam lithography. / Zhou, Jun; Wong, W. H.; Pun, E. Y.B.
Nonlinear Guided Waves and Their Applications, NLGW 2001. Optica Publishing Group (formerly OSA), 2001. p. 55-57 (Optics InfoBase Conference Papers).

Research output: Chapters, Conference Papers, Creative and Literary Works (RGC: 12, 32, 41, 45)32_Refereed conference paper (with host publication)peer-review