TY - JOUR
T1 - Polymer pen lithography using dual-elastomer tip arrays
AU - Xie, Zhuang
AU - Shen, Youde
AU - Zhou, Xuechang
AU - Yang, Yong
AU - Tang, Qing
AU - Miao, Qian
AU - Su, Jing
AU - Wu, Hongkai
AU - Zheng, Zijian
PY - 2012/9/10
Y1 - 2012/9/10
N2 - Dual-elastomer tip arrays are developed as a simple and cost-effective approach to significantly improve the uniformity and precision of polymer pen lithography (PPL). Both experiment and mechanical simulation demonstrate that the hard-apex, soft-base tip structure of the dual-elastomer tip array leads to precise control of feature size and reduced variation among different tips over large areas through fine control of the tip deformation. The dual-elastomer tip array is believed to be readily applied to fabricate nano- and microstructures for fundamental study and applications such as bioassays, sensors, optical and electronic devices. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
AB - Dual-elastomer tip arrays are developed as a simple and cost-effective approach to significantly improve the uniformity and precision of polymer pen lithography (PPL). Both experiment and mechanical simulation demonstrate that the hard-apex, soft-base tip structure of the dual-elastomer tip array leads to precise control of feature size and reduced variation among different tips over large areas through fine control of the tip deformation. The dual-elastomer tip array is believed to be readily applied to fabricate nano- and microstructures for fundamental study and applications such as bioassays, sensors, optical and electronic devices. Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
KW - dip-pen nanolithography
KW - polymer pen lithography
KW - scanning probe lithography
KW - soft lithography
KW - surface patterning
UR - http://www.scopus.com/inward/record.url?scp=84865995927&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84865995927&origin=recordpage
U2 - 10.1002/smll.201200849
DO - 10.1002/smll.201200849
M3 - RGC 21 - Publication in refereed journal
SN - 1613-6810
VL - 8
SP - 2664
EP - 2669
JO - Small
JF - Small
IS - 17
ER -