Polymer MEMS actuators for underwater micromanipulation

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

115 Scopus Citations
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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)334-342
Journal / PublicationIEEE/ASME Transactions on Mechatronics
Volume9
Issue number2
Online published21 Jun 2004
Publication statusPublished - Jun 2004
Externally publishedYes

Abstract

Conventional MEMS actuators are not suitable for underwater applications such as cell grasping due to two main reasons: 1) their required actuation voltage are typically higher than 2 V, which would cause electrolysis in water and 2) they have small displacement/deflection due to their inherent driving principles. In this paper, three-different types of novel polymer-based MEMS underwater actuators developed in our laboratory are discussed: 1) ionic conducting polymer films (ICPF) actuator, which actuates by stress gradient induced by ionic movement due to electric field; 2) parylene thermal actuator, which actuates due to the induced stress gradient across a structure made of different layers of materials with different thermal expansion coefficients; and 3) polyaniline (PANI) actuator, which actuates due to its volumetric change caused by a reversible electrochemical oxidation-reduction (redox) reaction. All these polymer micro actuators can be actuated underwater with large deflections and require less power input than conventional MEMS actuators. The experimental results from characterizing these prototype actuators are presented in this paper.

Citation Format(s)

Polymer MEMS actuators for underwater micromanipulation. / Zhou, Jennifer W.L.; Chan, Ho-Yin; To, Tony K.H. et al.
In: IEEE/ASME Transactions on Mechatronics, Vol. 9, No. 2, 06.2004, p. 334-342.

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review