Abstract
A polymer inking technique to form micro and nanopatterns on a substrate was discussed. In polymer inking technique, a polymer film is first spin coated onto a patterned hard mold. By contracting the mold and substrate at a suitable temperature and pressure, the polymer film on the protruted surfaces of the mold is transferred to the substrate, forming a positive image of the mold. It was found that the patterns inked from poly(carbonate) showed larger dimension shrinkage (∼75%) compared to that from poly(methyl methacrylate) (∼30%).
| Original language | English |
|---|---|
| Pages (from-to) | 2749-2754 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 21 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - Nov 2003 |
| Externally published | Yes |
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