Skip to main navigation Skip to search Skip to main content

Polymer inking as a micro- and nanopatterning technique

  • L. R. Bao
  • , L. Tan
  • , X. D. Huang
  • , Y. P. Kong
  • , L. J. Guo
  • , S. W. Pang
  • , A. F. Yee

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

A polymer inking technique to form micro and nanopatterns on a substrate was discussed. In polymer inking technique, a polymer film is first spin coated onto a patterned hard mold. By contracting the mold and substrate at a suitable temperature and pressure, the polymer film on the protruted surfaces of the mold is transferred to the substrate, forming a positive image of the mold. It was found that the patterns inked from poly(carbonate) showed larger dimension shrinkage (∼75%) compared to that from poly(methyl methacrylate) (∼30%).
Original languageEnglish
Pages (from-to)2749-2754
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number6
DOIs
Publication statusPublished - Nov 2003
Externally publishedYes

Fingerprint

Dive into the research topics of 'Polymer inking as a micro- and nanopatterning technique'. Together they form a unique fingerprint.

Cite this