PLC-Based High Voltage Pulse Modulator for Plasma Based Ion Implantation

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Publication status	Published - 7 Sept 2009
Event	10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009) - , Brazil Duration: 7 Sept 2009 → 11 Sept 2009

Conference	10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009)
Place	Brazil
Period	7/09/09 → 11/09/09

Other Access Options

@conference{a2f9fa564ace4d4a955e179e637345d8,

title = "PLC-Based High Voltage Pulse Modulator for Plasma Based Ion Implantation",

author = "Zhu, \{Z. T.\} and Y. Li and Gong, \{C. Z.\} and Tian, \{X. B.\} and Yang, \{S. Q.\} and R. Fu and Chu, \{P. K.\}",

year = "2009",

month = sep,

day = "7",

language = "English",

note = "10th International Workshop on Plasma-Based Ion Implantation \& Deposition (PBII\&D 2009) ; Conference date: 07-09-2009 Through 11-09-2009",

}

TY - CONF

T1 - PLC-Based High Voltage Pulse Modulator for Plasma Based Ion Implantation

AU - Zhu, Z. T.

AU - Li, Y.

AU - Gong, C. Z.

AU - Tian, X. B.

AU - Yang, S. Q.

AU - Fu, R.

AU - Chu, P. K.

PY - 2009/9/7

Y1 - 2009/9/7

M3 - RGC 32 - Refereed conference paper (without host publication)

T2 - 10th International Workshop on Plasma-Based Ion Implantation & Deposition (PBII&D 2009)

Y2 - 7 September 2009 through 11 September 2009

ER -