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Plasmonic printing of high-performance metal oxide electronics under room temperature

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Abstract

Solution-processed metal oxide (MO) thin-film transistors present substantial promise for next-generation large-area, low-cost electronics. However, challenges like prolonged high-temperature annealing (at >400 °C) and a lack of universal, high-resolution printing technology hinder their widespread applications. Here we report a processing technology, termed ‘plasmonic printing’, for fabricating high-performance, solution-processed all-MO thin-film electronics under room temperature and ambient conditions. This process leverages femtosecond-laser-excited silver nanowires to induce plasmonic local heating, facilitating rapid (<0.3 s) and localized conversion of MO precursors into high-quality MO thin films, including conductor, dielectric and semiconductor. Remarkably, these MO thin films exhibit superior electrical performance without the requirement of special gases or high-temperature treatment, thereby enhancing the fabrication efficiency. Furthermore, precise pattern control is demonstrated, enabling the fabrication of high-density, solution-processed all-MO transistor arrays (48,400 transistors per square centimetre) and integrated logic gates with uniformity and precision. This technology presents a promising pathway for the cost-effective and high-throughput printing of high-density, complex, multilayered solution-processed MO electronics, delivering performance on par with vacuum-based counterparts. © The Author(s), under exclusive licence to Springer Nature Limited 2025, modified publication 2026.
Original languageEnglish
Pages (from-to)2001-2010
Number of pages10
JournalNature Materials
Volume24
Issue number12
Online published19 Jun 2025
DOIs
Publication statusPublished - Dec 2025

Funding

This work was supported by the Foundation of National Natural Science Foundation of China (NSFC) (grant nos. 61421002 and 62022001), the Research Grants Council of the Hong Kong Special Administrative Region (grant nos. 11213721, AoE/P-502/20, 11215722, 11211523, A-CityU101/20 and RFS2324-1S03), City University of Hong Kong (grant nos. 9229055, 9610444, 9678274, 9680322, 9667246 and 9360165), the Nano & Material Technology Development Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Science and ICT (no. RS-2024-00411904), in part by the InnoHK Project on Project 2.2—AI-based three-dimensional ultrasound imaging algorithm at the Hong Kong Centre for Cerebro-Cardiovascular Health Engineering (COCHE), and the Innovation and Technology Commission of Hong Kong (grant no. MHP/162/22).

RGC Funding Information

  • RGC-funded

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