Plasma Technologies in Microelectronics and Biomedical Engineering

Kimho CHU

Plasma Technologies in Microelectronics and Biomedical Engineering

Kimho CHU

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

Original language	English
Publication status	Published - 16 Dec 2007
Event	105th Eastern Forum of Science and Technology - Synchrotron Radiation X-ray Microprobe, Microscopy and Applications - Shanghai, China Duration: 16 Dec 2007 → 17 Dec 2007

Conference

Conference	105th Eastern Forum of Science and Technology - Synchrotron Radiation X-ray Microprobe, Microscopy and Applications
Place	China
City	Shanghai
Period	16/12/07 → 17/12/07

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@conference{52b31564571d409dab0237aabf6aceb8,

title = "Plasma Technologies in Microelectronics and Biomedical Engineering",

author = "Kimho CHU",

year = "2007",

month = dec,

day = "16",

language = "English",

note = "105th Eastern Forum of Science and Technology - Synchrotron Radiation X-ray Microprobe, Microscopy and Applications ; Conference date: 16-12-2007 Through 17-12-2007",

}