Plasma implantation of cylindrical bore - A reality?

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Author(s)

Detail(s)

Original languageEnglish
Journal / PublicationIEEE International Conference on Plasma Science
Publication statusPublished - 2002

Conference

Title2002 IEEE International Conference on plasma Science
PlaceCanada
CityBanff, Alta.
Period26 - 30 May 2002

Abstract

Plasma immersion ion implantation has successfully been applied to treat the outer surface of objects with an irregular geometry. Theoretical and experimental investigations have also demonstrated the capability to implant the inner surfaces of cylindrical bores. However, practical implementation of the process is not straightforward due to the finite plasma volume. It is shown that a hardware system with inner plasma sources may be a more practical solution.