Plasma immersion ion implantation of ring-shaped insulating materials

^*Corresponding author for this work

Research output: Conference Papers › RGC 32 - Refereed conference paper (without host publication) › peer-review

Original language	English
Pages	145
Publication status	Published - Sept 2002
Event	3rd Workshop on Cluster Ion Beam Process Technology - Kyoto International Community House, Kyoto, Japan Duration: 10 Sept 2002 → 12 Sept 2002

Conference	3rd Workshop on Cluster Ion Beam Process Technology
Place	Japan
City	Kyoto
Period	10/09/02 → 12/09/02

Other Access Options

@conference{d7ee1eb3436745a3b85ea862a24933d0,

title = "Plasma immersion ion implantation of ring-shaped insulating materials",

author = "Tian, \{X. B.\} and Fu, \{Ricky, K. Y.\} and Chu, \{P. K.\}",

year = "2002",

month = sep,

language = "English",

pages = "145",

note = "3rd Workshop on Cluster Ion Beam Process Technology ; Conference date: 10-09-2002 Through 12-09-2002",

}