Plasma Immersion Ion Implantation: From Microelectronics to Biomedical Engineering

Paul CHU

Plasma Immersion Ion Implantation: From Microelectronics to Biomedical Engineering

Paul CHU

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

Original language	English
Publication status	Published - 1 Nov 2010
Event	10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China Duration: 1 Nov 2010 → 4 Nov 2010

Conference

Conference	10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT)
Place	China
City	Shanghai
Period	1/11/10 → 4/11/10

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@conference{24c8ed92b5db4e0d811c161997686e7d,

title = "Plasma Immersion Ion Implantation: From Microelectronics to Biomedical Engineering",

author = "Paul CHU",

year = "2010",

month = nov,

day = "1",

language = "English",

note = "10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) ; Conference date: 01-11-2010 Through 04-11-2010",

}