Plasma hydrogenation of strain-relaxed SiGeSi heterostructure for layer transfer
- Peng Chen
- , Paul K. Chu*
- , T. Höchbauer
- , M. Nastasi
- , D. Buca
- , S. Mantl
- , N. David Theodore
- , T. L. Alford
- , J. W. Mayer
- , R. Loo
- , M. Caymax
- , M. Cai
- , S. S. Lau
*Corresponding author for this work
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
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