Plasma-Based Technology in Microelectronics, Nanotechnology, and Biomedical Engineering

Research output: Conference Papers › RGC 31A - Invited conference paper (refereed items) › Yes › peer-review

Original language	English
Publication status	Published - 21 Nov 2008
Event	Annual Materials Research Society Taiwan Meeting - , Taiwan, China Duration: 21 Nov 2008 → 22 Nov 2008

Conference	Annual Materials Research Society Taiwan Meeting
Place	Taiwan, China
Period	21/11/08 → 22/11/08

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