Plasma-based Technology in Microelectronics and Biomedical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	Proceedings of the 15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)
Pages	6
Publication status	Published - 30 Sept 2007
Event	15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15) - Mumbai, India Duration: 30 Sept 2007 → 5 Oct 2007

Conference	15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)
Place	India
City	Mumbai
Period	30/09/07 → 5/10/07

Research Keywords

@inproceedings{b92f4067750549239e72c591506bbf5c,

title = "Plasma-based Technology in Microelectronics and Biomedical Engineering",

keywords = "Plasma",

author = "Kimho CHU",

year = "2007",

month = sep,

day = "30",

language = "English",

pages = "6",

booktitle = "Proceedings of the 15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)",

note = "15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15) ; Conference date: 30-09-2007 Through 05-10-2007",

}

TY - GEN

T1 - Plasma-based Technology in Microelectronics and Biomedical Engineering

AU - CHU, Kimho

PY - 2007/9/30

Y1 - 2007/9/30

KW - Plasma

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 6

BT - Proceedings of the 15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)

T2 - 15th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-15)

Y2 - 30 September 2007 through 5 October 2007

ER -