PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE

Yong Zhang; Xinyu Liu; Changhai Ru; Yanliang Zhang; Lixin Dong; Patrick Woo; Mitsuhiro Nakamura; David Hoyle; Ian Cotton; Yu Sun

doi:10.1109/MEMSYS.2011.5734502

PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE

Yong Zhang
, Xinyu Liu
, Changhai Ru
, Yanliang Zhang
, Lixin Dong
, Patrick Woo
, Mitsuhiro Nakamura
, David Hoyle
, Ian Cotton
, Yu Sun

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Abstract

This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the device enables two-point probe measurements of nanowires. A nanomanipulation procedure is developed to pick up a nanowire from its growth substrate and place it onto the MEMS device inside a scanning electron microscope. Piezoresistivity characterization of silicon nanowires is demonstrated.

Original language	English
Title of host publication	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)
Publisher	IEEE
Pages	625-628
ISBN (Electronic)	9781424496341
ISBN (Print)	9781424496327
DOIs	https://doi.org/10.1109/MEMSYS.2011.5734502
Publication status	Published - Jan 2011
Externally published	Yes
Event	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 - Cancun, Mexico Duration: 23 Jan 2011 → 27 Jan 2011 https://www.memsconferences.org/mems2011/

Publication series

Name	IEEE Micro Electro Mechanical Systems
ISSN (Print)	1084-6999

Conference

Conference	24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Place	Mexico
City	Cancun
Period	23/01/11 → 27/01/11
Internet address	https://www.memsconferences.org/mems2011/

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10.1109/MEMSYS.2011.5734502

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Zhang, Y., Liu, X., Ru, C., Zhang, Y., Dong, L., Woo, P., Nakamura, M., Hoyle, D., Cotton, I., & Sun, Y. (2011). PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE. In 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 625-628). Article 5734502 (IEEE Micro Electro Mechanical Systems ). IEEE. https://doi.org/10.1109/MEMSYS.2011.5734502

@inproceedings{d705b217142042aaab9739239c1e86ef,

title = "PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE",

abstract = "This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the device enables two-point probe measurements of nanowires. A nanomanipulation procedure is developed to pick up a nanowire from its growth substrate and place it onto the MEMS device inside a scanning electron microscope. Piezoresistivity characterization of silicon nanowires is demonstrated. ",

author = "Yong Zhang and Xinyu Liu and Changhai Ru and Yanliang Zhang and Lixin Dong and Patrick Woo and Mitsuhiro Nakamura and David Hoyle and Ian Cotton and Yu Sun",

year = "2011",

month = jan,

doi = "10.1109/MEMSYS.2011.5734502",

language = "English",

isbn = "9781424496327",

series = "IEEE Micro Electro Mechanical Systems ",

publisher = "IEEE",

pages = "625--628",

booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)",

address = "United States",

note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",

url = "https://www.memsconferences.org/mems2011/",

}

Zhang, Y, Liu, X, Ru, C, Zhang, Y, Dong, L, Woo, P, Nakamura, M, Hoyle, D, Cotton, I & Sun, Y 2011, PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE. in 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)., 5734502, IEEE Micro Electro Mechanical Systems , IEEE, pp. 625-628, 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011, Cancun, Mexico, 23/01/11. https://doi.org/10.1109/MEMSYS.2011.5734502

PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE. / Zhang, Yong; Liu, Xinyu; Ru, Changhai et al.
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS). IEEE, 2011. p. 625-628 5734502 (IEEE Micro Electro Mechanical Systems ).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE

AU - Zhang, Yong

AU - Liu, Xinyu

AU - Ru, Changhai

AU - Zhang, Yanliang

AU - Dong, Lixin

AU - Woo, Patrick

AU - Nakamura, Mitsuhiro

AU - Hoyle, David

AU - Cotton, Ian

AU - Sun, Yu

PY - 2011/1

Y1 - 2011/1

N2 - This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the device enables two-point probe measurements of nanowires. A nanomanipulation procedure is developed to pick up a nanowire from its growth substrate and place it onto the MEMS device inside a scanning electron microscope. Piezoresistivity characterization of silicon nanowires is demonstrated.

AB - This paper presents a MEMS device for simultaneous mechanical and electrical characterization of individual nanowires. The device consists of an electrostatic actuator and two capacitive sensors, enabling it to acquire all mechanical measurement data (force and displacement) electronically without relying on electron microscopy imaging. Electrical insulation within the suspended structures of the device enables two-point probe measurements of nanowires. A nanomanipulation procedure is developed to pick up a nanowire from its growth substrate and place it onto the MEMS device inside a scanning electron microscope. Piezoresistivity characterization of silicon nanowires is demonstrated.

UR - https://www.scopus.com/pages/publications/79953805523

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-79953805523&origin=recordpage

U2 - 10.1109/MEMSYS.2011.5734502

DO - 10.1109/MEMSYS.2011.5734502

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781424496327

T3 - IEEE Micro Electro Mechanical Systems

SP - 625

EP - 628

BT - 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS)

PB - IEEE

T2 - 24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011

Y2 - 23 January 2011 through 27 January 2011

ER -

PIEZORESISTIVITY CHARACTERIZATION OF SILICON NANOWIRES USING A MEMS DEVICE

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