Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
Projects
GRF: Contour Mode Acoustic Resonance in Silicon-on-insulator Mechanical Resonators using Internal Depletion Layer Transducers
LEE, E.-Y. J. (Principal Investigator / Project Coordinator) & Wong, M. (Co-Investigator)
1/01/14 → 23/05/18
Project: Research
