Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Engineering

100
Resonator Engineering
100
Micro-Electro-Mecha... Engineering
100
Electrical Performa... Engineering
100
Tuning Fork Engineering
20
Strain Gage Engineering
20
Sensing Application Engineering
20
Piezoresistor Engineering
20
Capacitive Engineering
20
Resonant Frequency Engineering
20
Boundary Condition Engineering
Research OutputsResearch Output authored by Piezoresistive Transduction in a Double-Ended Tuning Fork SOI MEMS Resonator for Enhanced Linear Electrical Performance is tagged with the concept