Piezoresistive transduction in a double-ended tuning fork SOI MEMS resonator for enhanced linear electrical performance

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Engineering & Materials Science

Research OutputsResearch Output authored by Piezoresistive transduction in a double-ended tuning fork SOI MEMS resonator for enhanced linear electrical performance is tagged with the concept