Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Engineering

100
Resonator Engineering
100
Q Factor Engineering
100
Microelectromechani... Engineering
25
Piezoresistor Engineering
Research OutputsResearch Output authored by Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair is tagged with the concept