Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

Yuanjie Xu; Haoshen Zhu; Joshua E.-Y. Lee

doi:10.1109/FCS.2014.6859868

Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

Yuanjie Xu^*
, Haoshen Zhu
, Joshua E.-Y. Lee

^*Corresponding author for this work

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

3 Citations (Scopus)

Abstract

We present a 13 MHz strongly coupled bulk Lamé mode silicon MEMS resonator-pair with quality factor (Q) of 10⁶ (i.e. f·Q product of 1.3×10¹³) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lamé mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lamé mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current.

Original language	English
Title of host publication	IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings
Publisher	IEEE
ISBN (Electronic)	978-1-4799-4915-1
DOIs	https://doi.org/10.1109/FCS.2014.6859868
Publication status	Published - May 2014
Event	2014 IEEE International Frequency Control Symposium, IFCS 2014 - Taipei, Taiwan, China Duration: 19 May 2014 → 22 May 2014

Conference

Conference	2014 IEEE International Frequency Control Symposium, IFCS 2014
Place	Taiwan, China
City	Taipei
Period	19/05/14 → 22/05/14

Research Keywords

Lamé mode
mechanical coupling
motional transconductance
piezoresistance
quality factor

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@inproceedings{5897f1516cee4d70a76c8b56f1267722,

title = "Piezoresistive sensing in a strongly-coupled high Q Lam{\'e} mode silicon MEMS resonator-pair",

abstract = "We present a 13 MHz strongly coupled bulk Lam{\'e} mode silicon MEMS resonator-pair with quality factor (Q) of 106 (i.e. f·Q product of 1.3×1013) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lam{\'e} mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lam{\'e} mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current. ",

keywords = "Lam{\'e} mode, mechanical coupling, motional transconductance, piezoresistance, quality factor",

author = "Yuanjie Xu and Haoshen Zhu and Lee, \{Joshua E.-Y.\}",

year = "2014",

month = may,

doi = "10.1109/FCS.2014.6859868",

language = "English",

booktitle = "IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings",

publisher = "IEEE",

address = "United States",

note = "2014 IEEE International Frequency Control Symposium, IFCS 2014 ; Conference date: 19-05-2014 Through 22-05-2014",

}

Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair. / Xu, Yuanjie; Zhu, Haoshen; Lee, Joshua E.-Y.
IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings. IEEE, 2014. 6859868.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

AU - Xu, Yuanjie

AU - Zhu, Haoshen

AU - Lee, Joshua E.-Y.

PY - 2014/5

Y1 - 2014/5

N2 - We present a 13 MHz strongly coupled bulk Lamé mode silicon MEMS resonator-pair with quality factor (Q) of 106 (i.e. f·Q product of 1.3×1013) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lamé mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lamé mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current.

AB - We present a 13 MHz strongly coupled bulk Lamé mode silicon MEMS resonator-pair with quality factor (Q) of 106 (i.e. f·Q product of 1.3×1013) in addition to a 28 dB increase in transduction by uniquely adapting the coupling spring as an integrated piezoresistor. Our device exploits and preserves the intrinsic high Q of the isochoric Lamé mode while also tapping into the high concentration of stress in the coupling spring as the pair of Lamé mode resonators is synchronized to resonate in phase. This concentration of stress along the coupling beam benefits the output transduction efficiency, which in turn results in enhancing overall transduction while preserving very high Q. Q of the device also remains stable with increasing bias current.

KW - Lamé mode

KW - mechanical coupling

KW - motional transconductance

KW - piezoresistance

KW - quality factor

UR - https://www.scopus.com/pages/publications/84906871431

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84906871431&origin=recordpage

U2 - 10.1109/FCS.2014.6859868

DO - 10.1109/FCS.2014.6859868

M3 - RGC 32 - Refereed conference paper (with host publication)

BT - IFCS 2014 - 2014 IEEE International Frequency Control Symposium, Proceedings

PB - IEEE

T2 - 2014 IEEE International Frequency Control Symposium, IFCS 2014

Y2 - 19 May 2014 through 22 May 2014

ER -

Piezoresistive sensing in a strongly-coupled high Q Lamé mode silicon MEMS resonator-pair

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