TY - JOUR
T1 - Piezoresistive Readout Mechanically Coupled Lamé Mode SOI Resonator with Q of a Million
AU - Zhu, Haoshen
AU - Xu, Yuanjie
AU - Lee, Joshua E-Y
PY - 2015/8/1
Y1 - 2015/8/1
N2 - This paper describes the use of the coupling beam in a pair of mechanically coupled Lamé mode resonators to enhance electromechanical transduction by piezoresistive sensing, while at the same time maintaining a high quality factor of a million. This corresponds to an f\!Q product of 1.3 \times 10^{13} , which approaches the Akhiezer limit of silicon. With a 15 mA bias current, electrical characterization of the array using the piezoresistive readout via the coupling-beam provides a 25 dB enhancement over a single Lamé mode resonator using capacitive readout. In this paper, we have modeled the piezoresistive electromechanical frequency response function of the device both analytically and by finite elements. The models mutually agree and are experimentally verified by measured results of fabricated resonators. The model indicates that the transduction factor is independent of the lateral dimensions and thickness of the resonator. [2015-0009]
AB - This paper describes the use of the coupling beam in a pair of mechanically coupled Lamé mode resonators to enhance electromechanical transduction by piezoresistive sensing, while at the same time maintaining a high quality factor of a million. This corresponds to an f\!Q product of 1.3 \times 10^{13} , which approaches the Akhiezer limit of silicon. With a 15 mA bias current, electrical characterization of the array using the piezoresistive readout via the coupling-beam provides a 25 dB enhancement over a single Lamé mode resonator using capacitive readout. In this paper, we have modeled the piezoresistive electromechanical frequency response function of the device both analytically and by finite elements. The models mutually agree and are experimentally verified by measured results of fabricated resonators. The model indicates that the transduction factor is independent of the lateral dimensions and thickness of the resonator. [2015-0009]
KW - bulk acoustic devices.
KW - mechanical-coupling
KW - Microresonators
KW - piezoresistive
KW - quality factor
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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84938592298&origin=recordpage
U2 - 10.1109/JMEMS.2015.2414441
DO - 10.1109/JMEMS.2015.2414441
M3 - 21_Publication in refereed journal
VL - 24
SP - 771
EP - 780
JO - Journal of Microelectromechanical Systems
JF - Journal of Microelectromechanical Systems
SN - 1057-7157
IS - 4
M1 - 77441899
ER -