Piezoelectric-on-silicon Lorentz force magnetometers based on radial contour mode disk resonators

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Projects

  1. GRF: VHF Piezoelectric Aluminum Nitride on Silicon Lamb Wave Mode Micromechanical Lorentz Force Magnetometers

    LEE, E.-Y. J. (Principal Investigator / Project Coordinator)

    1/01/173/06/21

    Project: Research