Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water

Abid Ali; Joshua E.-Y. Lee

doi:10.1109/FCS.2017.8088791

Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

3 Citations (Scopus)

Abstract

We present a unique lateral bulk resonance mode with a lateral strain profile that resembles a shirt button that we transduce piezoelectrically in a MEMS disk resonator. This button-like (BL) mode offers the 3-fold benefits of (1) intrinsic feedthrough cancellation using fully-differential transduction, (2) strong piezoelectric coupling from the associated strain profile, and (3) higher quality (Q) factor compared to the fundamental wine glass (WG1) mode in water. These above features make the BL mode highly attractive when applying MEMS resonators to mass sensing in liquid. We demonstrate enhancements in Q factor by 68% to a Q factor of 265 and 41% increase in the coupling factor (k_t ²) relative to the WG1 mode when transducing in water, leading to a signal-to-background ratio (SBR) of 28.1 dB even in water.

Original language	English
Title of host publication	2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
Publisher	IEEE
Pages	26-29
ISBN (Print)	978-1-5386-2916-1
DOIs	https://doi.org/10.1109/FCS.2017.8088791
Publication status	Published - Jul 2017
Event	2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France Duration: 9 Jul 2017 → 13 Jul 2017

Conference

Conference	2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
Country/Territory	France
City	Besancon
Period	9/07/17 → 13/07/17

Research Keywords

MEMS resonator
piezoelectric-on-silicon technology
Viscous damping

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10.1109/FCS.2017.8088791

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@inproceedings{e7f45144e56e49d4a6c7c149e9c8d7bf,

title = "Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water",

abstract = "We present a unique lateral bulk resonance mode with a lateral strain profile that resembles a shirt button that we transduce piezoelectrically in a MEMS disk resonator. This button-like (BL) mode offers the 3-fold benefits of (1) intrinsic feedthrough cancellation using fully-differential transduction, (2) strong piezoelectric coupling from the associated strain profile, and (3) higher quality (Q) factor compared to the fundamental wine glass (WG1) mode in water. These above features make the BL mode highly attractive when applying MEMS resonators to mass sensing in liquid. We demonstrate enhancements in Q factor by 68% to a Q factor of 265 and 41% increase in the coupling factor (kt 2) relative to the WG1 mode when transducing in water, leading to a signal-to-background ratio (SBR) of 28.1 dB even in water.",

keywords = "MEMS resonator, piezoelectric-on-silicon technology, Viscous damping",

author = "Abid Ali and Lee, {Joshua E.-Y.}",

year = "2017",

month = jul,

doi = "10.1109/FCS.2017.8088791",

language = "English",

isbn = "978-1-5386-2916-1",

pages = "26--29",

booktitle = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings",

publisher = "IEEE",

address = "United States",

note = "2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 ; Conference date: 09-07-2017 Through 13-07-2017",

}

Ali, A & Lee, JE-Y 2017, Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water. in 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings., 8088791, IEEE, pp. 26-29, 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017, Besancon, France, 9/07/17. https://doi.org/10.1109/FCS.2017.8088791

Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water. / Ali, Abid ; Lee, Joshua E.-Y.
2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings. IEEE, 2017. p. 26-29 8088791.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water

AU - Ali, Abid

AU - Lee, Joshua E.-Y.

PY - 2017/7

Y1 - 2017/7

N2 - We present a unique lateral bulk resonance mode with a lateral strain profile that resembles a shirt button that we transduce piezoelectrically in a MEMS disk resonator. This button-like (BL) mode offers the 3-fold benefits of (1) intrinsic feedthrough cancellation using fully-differential transduction, (2) strong piezoelectric coupling from the associated strain profile, and (3) higher quality (Q) factor compared to the fundamental wine glass (WG1) mode in water. These above features make the BL mode highly attractive when applying MEMS resonators to mass sensing in liquid. We demonstrate enhancements in Q factor by 68% to a Q factor of 265 and 41% increase in the coupling factor (kt 2) relative to the WG1 mode when transducing in water, leading to a signal-to-background ratio (SBR) of 28.1 dB even in water.

AB - We present a unique lateral bulk resonance mode with a lateral strain profile that resembles a shirt button that we transduce piezoelectrically in a MEMS disk resonator. This button-like (BL) mode offers the 3-fold benefits of (1) intrinsic feedthrough cancellation using fully-differential transduction, (2) strong piezoelectric coupling from the associated strain profile, and (3) higher quality (Q) factor compared to the fundamental wine glass (WG1) mode in water. These above features make the BL mode highly attractive when applying MEMS resonators to mass sensing in liquid. We demonstrate enhancements in Q factor by 68% to a Q factor of 265 and 41% increase in the coupling factor (kt 2) relative to the WG1 mode when transducing in water, leading to a signal-to-background ratio (SBR) of 28.1 dB even in water.

KW - MEMS resonator

KW - piezoelectric-on-silicon technology

KW - Viscous damping

UR - http://www.scopus.com/inward/record.url?scp=85040195018&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85040195018&origin=recordpage

U2 - 10.1109/FCS.2017.8088791

DO - 10.1109/FCS.2017.8088791

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 978-1-5386-2916-1

SP - 26

EP - 29

BT - 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings

PB - IEEE

T2 - 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017

Y2 - 9 July 2017 through 13 July 2017

ER -

Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water

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