Piezoelectric transduction of a button-like mode disk resonator for enhanced quality factor in water

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

3 Citations (Scopus)

Abstract

We present a unique lateral bulk resonance mode with a lateral strain profile that resembles a shirt button that we transduce piezoelectrically in a MEMS disk resonator. This button-like (BL) mode offers the 3-fold benefits of (1) intrinsic feedthrough cancellation using fully-differential transduction, (2) strong piezoelectric coupling from the associated strain profile, and (3) higher quality (Q) factor compared to the fundamental wine glass (WG1) mode in water. These above features make the BL mode highly attractive when applying MEMS resonators to mass sensing in liquid. We demonstrate enhancements in Q factor by 68% to a Q factor of 265 and 41% increase in the coupling factor (kt 2) relative to the WG1 mode when transducing in water, leading to a signal-to-background ratio (SBR) of 28.1 dB even in water.
Original languageEnglish
Title of host publication2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Proceedings
PublisherIEEE
Pages26-29
ISBN (Print)978-1-5386-2916-1
DOIs
Publication statusPublished - Jul 2017
Event2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017 - Besancon, France
Duration: 9 Jul 201713 Jul 2017

Conference

Conference2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFC 2017
Country/TerritoryFrance
CityBesancon
Period9/07/1713/07/17

Research Keywords

  • MEMS resonator
  • piezoelectric-on-silicon technology
  • Viscous damping

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