Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Author(s)

  • Xianbin Li
  • Junjie Zhang
  • Bowei Zhang
  • Wei Zhang

Related Research Unit(s)

Detail(s)

Original languageEnglish
Title of host publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
PublisherInstitute of Electrical and Electronics Engineers, Inc.
Pages903-906
ISBN (electronic)9784886864352
ISBN (print)9798350333022
Publication statusPublished - Jun 2023

Publication series

NameInternational Conference on Solid-State Sensors, Actuators and Microsystems, Transducers
ISSN (Print)2167-0013
ISSN (electronic)2167-0021

Conference

Title22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)
LocationKyoto International Conference Center
PlaceJapan
CityKyoto
Period25 - 29 June 2023

Link(s)

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Document Link

Links
Link to Scopus https://www.scopus.com/record/display.uri?eid=2-s2.0-85193510297&origin=recordpage
Permanent Link https://scholars.cityu.edu.hk/en/publications/publication(d04245ff-8970-4045-8601-472a0451e11e).html

Abstract

This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning. © 2023 IEEJ.

Research Area(s)

  • Acoustofluidics, bubble-based stirring, particle manipulation, PMUT, reconfigurable

Fingerprint

Publication fingerprints text

100
Bubble Engineering
100
Piezoelectric Engineering
100
Ultrasonics Engineering
100
Transducer Engineering
100
Reconfigurable Keyphrases
100
Piezoelectric Micro... Keyphrases
100
Particle Patterning Keyphrases
100
particles INIS
100
bubbles INIS
100
piezoelectricity INIS
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Citation Format(s)

[ RIS ] [ BibTeX ]
Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. / Li, Xianbin; Qian, Jingui; Zhang, Junjie et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). Institute of Electrical and Electronics Engineers, Inc., 2023. p. 903-906 (International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review