Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Xianbin Li; Jingui Qian; Junjie Zhang; Bowei Zhang; Joshua E.-Y. Lee; Wei Zhang

Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Xianbin Li
, Jingui Qian^*
, Junjie Zhang
, Bowei Zhang
, Joshua E.-Y. Lee
, Wei Zhang

^*Corresponding author for this work

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

2 Citations (Scopus)

Abstract

This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning. © 2023 IEEJ.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Publisher	IEEE
Pages	903-906
ISBN (Electronic)	9784886864352
ISBN (Print)	9798350333022
Publication status	Published - Jun 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023) - Kyoto International Conference Center, Kyoto, Japan Duration: 25 Jun 2023 → 29 Jun 2023 https://www.transducersconferences.org/archive/transducers2023/

Publication series

Name	International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers
ISSN (Print)	2167-0013
ISSN (Electronic)	2167-0021

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)
Abbreviated title	Transducers2023
Place	Japan
City	Kyoto
Period	25/06/23 → 29/06/23
Internet address	https://www.transducersconferences.org/archive/transducers2023/

Funding

This work was supported by the Fundamental Research Funds for the Central Universities under Grant No. JZ2022HGTA0328 and the Hong Kong Research Grants Council under Project CityU 11218118.

Research Keywords

Acoustofluidics
bubble-based stirring
particle manipulation
PMUT
reconfigurable

RGC Funding Information

RGC-funded

Access Output

https://ieeexplore.ieee.org/document/10517076

Other Access Options

Check CityUHK Library

Permanent Link

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Cite this

Li, X., Qian, J., Zhang, J., Zhang, B., Lee, J. E.-Y., & Zhang, W. (2023). Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) (pp. 903-906). (International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers). IEEE. https://ieeexplore.ieee.org/document/10517076

Li, Xianbin ; Qian, Jingui ; Zhang, Junjie et al. / Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, 2023. pp. 903-906 (International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers).

@inproceedings{d04245ff897040458601472a0451e11e,

title = "Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning",

abstract = "This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning. {\textcopyright} 2023 IEEJ.",

keywords = "Acoustofluidics, bubble-based stirring, particle manipulation, PMUT, reconfigurable",

author = "Xianbin Li and Jingui Qian and Junjie Zhang and Bowei Zhang and Lee, \{Joshua E.-Y.\} and Wei Zhang",

year = "2023",

month = jun,

language = "English",

isbn = "9798350333022",

series = "International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers",

publisher = "IEEE",

pages = "903--906",

booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)",

address = "United States",

note = "22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Transducers2023 ; Conference date: 25-06-2023 Through 29-06-2023",

url = "https://www.transducersconferences.org/archive/transducers2023/",

}

Li, X, Qian, J, Zhang, J, Zhang, B, Lee, JE-Y & Zhang, W 2023, Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers, IEEE, pp. 903-906, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023), Kyoto, Japan, 25/06/23. <https://ieeexplore.ieee.org/document/10517076>

Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. / Li, Xianbin; Qian, Jingui; Zhang, Junjie et al.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE, 2023. p. 903-906 (International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

AU - Li, Xianbin

AU - Qian, Jingui

AU - Zhang, Junjie

AU - Zhang, Bowei

AU - Lee, Joshua E.-Y.

AU - Zhang, Wei

PY - 2023/6

Y1 - 2023/6

N2 - This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning. © 2023 IEEJ.

AB - This paper presents a novel on-chip acoustofluidic manipulation technique that uses a piezoelectric micromachined ultrasonic transducer (PMUT) to fuse two functions: bubble-based stirring and reconfigurable particle patterning. The unique merits of this platform include (1) highly localized acoustic actuation without using a power amplifier; (2) ultra-low sample volumes for rapid bioanalysis; (3) potential for high throughput by device integration; (4) CMOS compatibility for sensing; (5) ease of switching between functions by adjusting the frequency for multiple modes of patterning. © 2023 IEEJ.

KW - Acoustofluidics

KW - bubble-based stirring

KW - particle manipulation

KW - PMUT

KW - reconfigurable

UR - https://www.scopus.com/pages/publications/85193510297

UR - https://www.scopus.com/pages/publications/85193510297#tab=impact

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9798350333022

T3 - International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers

SP - 903

EP - 906

BT - 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

PB - IEEE

T2 - 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)

Y2 - 25 June 2023 through 29 June 2023

ER -

Li X, Qian J, Zhang J, Zhang B, Lee JEY, Zhang W. Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). IEEE. 2023. p. 903-906. (International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers).

Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Abstract

Publication series

Conference

Funding

Research Keywords

RGC Funding Information

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Other Access Options

Permanent Link

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GRF: Acoustically-Driven Manipulation of Micro-Particles in Fluid on Piezoelectric Resonant Mass Sensors

Cite this

Piezoelectric Micromachined Ultrasonic Transducer Enables Bubble-Based Stirring and Reconfigurable Particle Patterning

Abstract

Publication series

Conference

Funding

Research Keywords

RGC Funding Information

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Projects

GRF: Acoustically-Driven Manipulation of Micro-Particles in Fluid on Piezoelectric Resonant Mass Sensors

Cite this