Photoluminescence of silicon nanocrystals embedded in silicon oxidel
Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review
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Detail(s)
Original language | English |
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Pages (from-to) | 1272-1276 |
Journal / Publication | Journal of Nanoscience and Nanotechnology |
Volume | 9 |
Issue number | 2 |
Publication status | Published - Feb 2009 |
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Abstract
The bonding structure and the optical properties of silicon-rich silicon oxide films which were prepared using plasma-enhanced chemical vapor deposition (PECVD) with thermal oxidation were studied in detail. The composition and bonding structures were explored using X-ray photoelectron spectroscopy (XPS). The luminescent properties were studied using Raman spectroscopy and photoluminescence (PL) measurements. Results show that high-temperature ('-'1 000 °C) annealing of as-deposited Si-rich silicon oxide gives rise to phase separation and formation of crystalline Si phases in the oxide films. Upon high temperature annealing, the PL (550-900 nm) intensity was significantly reduced in stoichiometric oxide or in low Si-content (prepared with [N20]/[SiH4j gas flow ratio > 2.5) films whereas an opposite trend was found in higher Si-rich samples. Particularly, for the red band (650 nm) and the infrared band (750 nm), the PL intensity was significantly enhanced by annealing slightly Si-rich samples ([N20]/[SiH4] = 2.5) at 1100 C. This observation was explained by the formation of Si nanocrystallites via phase separation reaction and the removal of defect-related absorption centers during annealing. Copyright © 2009 American Scientific Publishers All rights reserved.
Research Area(s)
- Photoluminescence, Raman., Si nanocrystals
Citation Format(s)
Photoluminescence of silicon nanocrystals embedded in silicon oxidel. / Wong, C. K.; Wong, Hel; Filipt, V.
In: Journal of Nanoscience and Nanotechnology, Vol. 9, No. 2, 02.2009, p. 1272-1276.Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review