Photolithographic micromolding of ceramics using plasma etched polyimide patterns

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

23 Scopus Citations

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Author(s)

J. A. Bride
S. Baskaran
N. Taylor
J. W. Halloran
W. H. Juan
M. O'Donnell

Detail(s)

Original language	English
Pages (from-to)	3379-3381
Journal / Publication	Applied Physics Letters
Volume	63
Issue number	24
Publication status	Published - 1993
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1063/1.110151 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-0000788662&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(f2be327d-8962-4952-b597-63aa899ca3da).html

Abstract

Features as fine as 4 μm with high aspect ratio were produced from ceria-zirconia ceramic using a thick plasma-etched polyimide layer as a micromold.

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Publication fingerprints text

Polyimide Material Science

Blood Plasma Physics

Zirconia Material Science

Cerium Oxide Material Science

Aspect Ratio Physics

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Citation Format(s)

[ RIS ] [ BibTeX ]

Photolithographic micromolding of ceramics using plasma etched polyimide patterns. / Bride, J. A.; Baskaran, S.; Taylor, N. et al.
In: Applied Physics Letters, Vol. 63, No. 24, 1993, p. 3379-3381.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Bride, JA, Baskaran, S, Taylor, N, Halloran, JW, Juan, WH, Pang, SW & O'Donnell, M 1993, 'Photolithographic micromolding of ceramics using plasma etched polyimide patterns', Applied Physics Letters, vol. 63, no. 24, pp. 3379-3381. https://doi.org/10.1063/1.110151

Bride, J. A., Baskaran, S., Taylor, N., Halloran, J. W., Juan, W. H., Pang, S. W., & O'Donnell, M. (1993). Photolithographic micromolding of ceramics using plasma etched polyimide patterns. Applied Physics Letters, 63(24), 3379-3381. https://doi.org/10.1063/1.110151

Bride JA, Baskaran S, Taylor N, Halloran JW, Juan WH, Pang SW et al. Photolithographic micromolding of ceramics using plasma etched polyimide patterns. Applied Physics Letters. 1993;63(24):3379-3381. doi: 10.1063/1.110151

Bride, J. A. ; Baskaran, S. ; Taylor, N. et al. / Photolithographic micromolding of ceramics using plasma etched polyimide patterns. In: Applied Physics Letters. 1993 ; Vol. 63, No. 24. pp. 3379-3381.