Photolithographic micromolding of ceramics using plasma etched polyimide patterns

J. A. Bride; S. Baskaran; N. Taylor; J. W. Halloran; W. H. Juan; S. W. Pang; M. O'Donnell

doi:10.1063/1.110151

Photolithographic micromolding of ceramics using plasma etched polyimide patterns

J. A. Bride
, S. Baskaran
, N. Taylor
, J. W. Halloran
, W. H. Juan
, S. W. Pang
, M. O'Donnell

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

23 Citations (Scopus)

Abstract

Features as fine as 4 μm with high aspect ratio were produced from ceria-zirconia ceramic using a thick plasma-etched polyimide layer as a micromold.

© 1993 American Institute of Physics

Original language	English
Pages (from-to)	3379-3381
Journal	Applied Physics Letters
Volume	63
Issue number	24
DOIs	https://doi.org/10.1063/1.110151
Publication status	Published - 1993
Externally published	Yes

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@article{f2be327d89624952b59763aa899ca3da,

title = "Photolithographic micromolding of ceramics using plasma etched polyimide patterns",

abstract = "Features as fine as 4 μm with high aspect ratio were produced from ceria-zirconia ceramic using a thick plasma-etched polyimide layer as a micromold. {\textcopyright} 1993 American Institute of Physics",

author = "Bride, \{J. A.\} and S. Baskaran and N. Taylor and Halloran, \{J. W.\} and Juan, \{W. H.\} and Pang, \{S. W.\} and M. O'Donnell",

year = "1993",

doi = "10.1063/1.110151",

language = "English",

volume = "63",

pages = "3379--3381",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "24",

}

TY - JOUR

T1 - Photolithographic micromolding of ceramics using plasma etched polyimide patterns

AU - Bride, J. A.

AU - Baskaran, S.

AU - Taylor, N.

AU - Halloran, J. W.

AU - Juan, W. H.

AU - Pang, S. W.

AU - O'Donnell, M.

PY - 1993

Y1 - 1993

UR - https://www.scopus.com/pages/publications/0000788662

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0000788662&origin=recordpage

U2 - 10.1063/1.110151

DO - 10.1063/1.110151

M3 - RGC 21 - Publication in refereed journal

SN - 0003-6951

VL - 63

SP - 3379

EP - 3381

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 24

ER -

Photolithographic micromolding of ceramics using plasma etched polyimide patterns

Abstract

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