Abstract
Thin molybdenum disilicide (MoSi<sub>2</sub>) films have been produced by magnetron sputter deposition, and subjected to oxidation tests for the study of "MoSi<sub>2</sub> pest"-a phenomenon showing disintegration of a solid piece of MoSi<sub>2</sub> into powdery products. The as-prepared films were of an amorphous structure. Oxidation of the films in air at 500° C led first to cracking of the films, and then the cracked pieces eventually evolved into disintegrated powders with a yellowish appearance. Secondary electron microscopy and Auger electron spectroscopy revealed that the reaction products consisted of MoO<sub>3</sub> whiskers (platelets), Si-Mo-O fibres, SiO<sub>2</sub> clusters, and some residual MoSi<sub>2</sub>. The disintegration of MoSi<sub>2</sub> films appeared to be independent of their crystal structure; a similar phenomenon was also observed in crystallized films, with a metastable hexagonal structure, oxidized under the same conditions. The disintegration of the MoSi<sub>2</sub> films is compared to and correlated with the "pest reaction" of bulk MoSi<sub>2</sub>. © 1994 Chapman & Hall.
| Original language | English |
|---|---|
| Pages (from-to) | 2963-2967 |
| Journal | Journal of Materials Science |
| Volume | 29 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - Jun 1994 |
| Externally published | Yes |
Bibliographical note
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