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Pattern fidelity in nanoimprinted films using critical dimension small angle x-ray scattering
Ronald L. Jones, Christopher L. Soles, Eric K. Lin, Walter Hu, Ronald M. Reano, Stella W. Pang, Steven J. Weigand, Denis T. Keane, John P. Quintana
Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review
17
Citations
(Scopus)