PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII)

Dixon T. K. Kwok; Leif H. Y. Lai; Ricky K. Y. Fu; Paul K. Chu

PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII)

Dixon T. K. Kwok
, Leif H. Y. Lai
, Ricky K. Y. Fu
, Paul K. Chu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	ABSTRACTS OF FRONTIERS OF SURFACE ENGINEERING 2001 (FSE 2001)
Publisher	The Surface Finishing Society of Japan
Pages	143
Publication status	Published - Oct 2001
Event	The 2001 Joint International Conference of The 6th Asian Surface Finishing Forum (6th ASFF) and Third Asian-European International Conference on Plasma Surface Engineering (AEPSE 2001) and The 5th Asia-Pacific Interfinish Congress (5th APIC) and the 4th Japan-Korea Symposium on Plasma and Thin Film Technology (4th JKSPTFT) - Nagoya Congress Center, Nagoya, Japan Duration: 28 Oct 2001 → 1 Nov 2001

Conference

Conference	The 2001 Joint International Conference of The 6th Asian Surface Finishing Forum (6th ASFF) and Third Asian-European International Conference on Plasma Surface Engineering (AEPSE 2001) and The 5th Asia-Pacific Interfinish Congress (5th APIC) and the 4th Japan-Korea Symposium on Plasma and Thin Film Technology (4th JKSPTFT)
Place	Japan
City	Nagoya
Period	28/10/01 → 1/11/01

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@inproceedings{2cba496ae6e447ccbef55cacbdcac5ab,

title = "PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII)",

author = "Kwok, \{Dixon T. K.\} and Lai, \{Leif H. Y.\} and Fu, \{Ricky K. Y.\} and Chu, \{Paul K.\}",

year = "2001",

month = oct,

language = "English",

pages = "143",

booktitle = "ABSTRACTS OF FRONTIERS OF SURFACE ENGINEERING 2001 (FSE 2001)",

publisher = "The Surface Finishing Society of Japan",

note = "The 2001 Joint International Conference of The 6th Asian Surface Finishing Forum (6th ASFF) and Third Asian-European International Conference on Plasma Surface Engineering (AEPSE 2001) and The 5th Asia-Pacific Interfinish Congress (5th APIC) and the 4th Japan-Korea Symposium on Plasma and Thin Film Technology (4th JKSPTFT) ; Conference date: 28-10-2001 Through 01-11-2001",

}

Kwok, DTK, Lai, LHY, Fu, RKY & Chu, PK 2001, PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII). in ABSTRACTS OF FRONTIERS OF SURFACE ENGINEERING 2001 (FSE 2001). The Surface Finishing Society of Japan, pp. 143, The 2001 Joint International Conference of The 6th Asian Surface Finishing Forum (6th ASFF) and Third Asian-European International Conference on Plasma Surface Engineering (AEPSE 2001) and The 5th Asia-Pacific Interfinish Congress (5th APIC) and the 4th Japan-Korea Symposium on Plasma and Thin Film Technology (4th JKSPTFT), Nagoya, Japan, 28/10/01.

PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII). / Kwok, Dixon T. K.; Lai, Leif H. Y.; Fu, Ricky K. Y. et al.
ABSTRACTS OF FRONTIERS OF SURFACE ENGINEERING 2001 (FSE 2001). The Surface Finishing Society of Japan, 2001. p. 143.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - PARTICLE-IN-CELL (PIC) SIMULATION OF PULSED AND QUASI-DC (DIRECT CURRENT) PLASMA IMMERSION ION IMPLANTATION (PIII)

AU - Kwok, Dixon T. K.

AU - Lai, Leif H. Y.

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

PY - 2001/10

Y1 - 2001/10

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 143

BT - ABSTRACTS OF FRONTIERS OF SURFACE ENGINEERING 2001 (FSE 2001)

PB - The Surface Finishing Society of Japan

T2 - The 2001 Joint International Conference of The 6th Asian Surface Finishing Forum (6th ASFF) and Third Asian-European International Conference on Plasma Surface Engineering (AEPSE 2001) and The 5th Asia-Pacific Interfinish Congress (5th APIC) and the 4th Japan-Korea Symposium on Plasma and Thin Film Technology (4th JKSPTFT)

Y2 - 28 October 2001 through 1 November 2001

ER -