Packaging carbon nanotube based infrared detector

Wai Chiu Lai King; Xi Ning; Zhang Jiangbo; Li Guangyong; Chen Hongzhi

doi:10.1109/NANO.2007.4601301

Packaging carbon nanotube based infrared detector

Wai Chiu Lai King, Xi Ning, Zhang Jiangbo, Li Guangyong, Chen Hongzhi

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

18 Citations (Scopus)

Abstract

We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin Aim was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance. © 2007 IEEE.

Original language	English
Title of host publication	2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings
Pages	778-781
DOIs	https://doi.org/10.1109/NANO.2007.4601301
Publication status	Published - 2007
Externally published	Yes
Event	7th IEEE International Conference on Nanotechnology (IEEE-NANO 2007) - Hong Kong, China Duration: 2 Aug 2007 → 5 Aug 2007 https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4601127

Conference

Conference	7th IEEE International Conference on Nanotechnology (IEEE-NANO 2007)
Abbreviated title	IEEE-NANO 2007
Place	China
City	Hong Kong
Period	2/08/07 → 5/08/07
Internet address	https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4601127

Research Keywords

IR sensors
Nanotube
Packaging
Parylene C
Single CNT

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10.1109/NANO.2007.4601301

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title = "Packaging carbon nanotube based infrared detector",

abstract = "We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin Aim was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance. {\textcopyright} 2007 IEEE.",

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year = "2007",

doi = "10.1109/NANO.2007.4601301",

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note = "7th IEEE International Conference on Nanotechnology (IEEE-NANO 2007), IEEE-NANO 2007 ; Conference date: 02-08-2007 Through 05-08-2007",

url = "https://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=4601127",

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Packaging carbon nanotube based infrared detector. / King, Wai Chiu Lai; Ning, Xi; Jiangbo, Zhang et al.
2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings. 2007. p. 778-781 4601301.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Packaging carbon nanotube based infrared detector

AU - King, Wai Chiu Lai

AU - Ning, Xi

AU - Jiangbo, Zhang

AU - Guangyong, Li

AU - Hongzhi, Chen

PY - 2007

Y1 - 2007

N2 - We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin Aim was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance. © 2007 IEEE.

AB - We present a fabrication and packaging method of carbon nanotube (CNT) based infrared (IR) sensor chip using parylene C layer. CNT was found to be sensitive under near IR radiation and it could be used as IR sensing element. Parylene C thin Aim was used as a conformal pin hole free insulating layer and oxygen barrier for protecting CNTs during the detection. The IR transmission properties of parylene C layer and the influence on the response of the CNT sensor were studied. Our experimental results showed that the CNT sensor without parylene C protection exhibited current change when it was exposed to the IR laser. The sensing current percentage changes decreased when the parylene C thin film substrate was placed between the CNT sensor and IR laser source. It implied the IR absorption behavior of parylene C thin film. We also found that the IR absorption level is proportional to the thickness of the parylene C layer. The parylene C packaged CNT sensor was fabricated and tested under near IR radiation. Preliminary results indicated that the CNT IR detector coated with parylene C was capable of sensing IR radiation and exhibited repeatable response. Moreover, the IV characteristic of the sensor chip was measured when it was surrounded by dry ice for long time to investigate its long term stability under moisture environment. Therefore, the packaging process can become possible to fabricate a CNT based IR sensor array which possesses more stable and reliable performance. © 2007 IEEE.

KW - IR sensors

KW - Nanotube

KW - Packaging

KW - Parylene C

KW - Single CNT

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M3 - RGC 32 - Refereed conference paper (with host publication)

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EP - 781

BT - 2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

T2 - 7th IEEE International Conference on Nanotechnology (IEEE-NANO 2007)

Y2 - 2 August 2007 through 5 August 2007

ER -

Packaging carbon nanotube based infrared detector

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