Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

Guizhi Wu; Shengli Ma; Kewei Xu; Vincent Ji; Paul K. Chu

doi:10.1116/1.4721376

Author(s)

Guizhi Wu
Shengli Ma
Kewei Xu
Vincent Ji
Paul K. Chu

Detail(s)

Original language	English
Article number	41508
Journal / Publication	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	30
Issue number	4
Publication status	Published - Jul 2012

Link(s)

DOI	DOI https://doi.org/10.1116/1.4721376 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84863682063&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(07080aca-ddf9-4458-bd30-7debdb055770).html

Abstract

The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K _p at 1000 °C decreases to 3.36 10 ^-10 kg ² m ^-4 s ^-1 when the Al concentration is increased to 30 at. % , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al ₂O ₃, TiO ₂, and SiO ₂ that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. © 2012 American Vacuum Society.

Citation Format(s)

[ RIS ] [ BibTeX ]

Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism. / Wu, Guizhi; Ma, Shengli; Xu, Kewei et al.

In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, Vol. 30, No. 4, 41508, 07.2012.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Wu, G, Ma, S, Xu, K, Ji, V & Chu, PK 2012, 'Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism', Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, vol. 30, no. 4, 41508. https://doi.org/10.1116/1.4721376

Wu, G., Ma, S., Xu, K., Ji, V., & Chu, P. K. (2012). Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 30(4), [41508]. https://doi.org/10.1116/1.4721376

Wu G, Ma S, Xu K, Ji V, Chu PK. Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2012 Jul;30(4):41508. doi: 10.1116/1.4721376

Wu, Guizhi ; Ma, Shengli ; Xu, Kewei et al. / Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism. In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2012 ; Vol. 30, No. 4.