Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

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Original languageEnglish
Article number41508
Journal / PublicationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
Publication statusPublished - Jul 2012


The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K p at 1000 °C decreases to 3.36 10 -10 kg 2 m -4 s -1 when the Al concentration is increased to 30 at. % , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al 2O 3, TiO 2, and SiO 2 that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. © 2012 American Vacuum Society.