Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

Guizhi Wu; Shengli Ma; Kewei Xu; Vincent Ji; Paul K. Chu

doi:10.1116/1.4721376

Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

Guizhi Wu
, Shengli Ma
, Kewei Xu
, Vincent Ji
, Paul K. Chu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

4 Citations (Scopus)

Abstract

The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K _p at 1000 °C decreases to 3.36 10 ^-10 kg ² m ^-4 s ^-1 when the Al concentration is increased to 30 at. % , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al ₂O ₃, TiO ₂, and SiO ₂ that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. © 2012 American Vacuum Society.

Original language	English
Article number	41508
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	30
Issue number	4
DOIs	https://doi.org/10.1116/1.4721376
Publication status	Published - Jul 2012

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@article{07080acaddf94458bd307debdb055770,

title = "Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism",

abstract = "The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K p at 1000 °C decreases to 3.36 10 -10 kg 2 m -4 s -1 when the Al concentration is increased to 30 at. \% , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al 2O 3, TiO 2, and SiO 2 that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. {\textcopyright} 2012 American Vacuum Society.",

author = "Guizhi Wu and Shengli Ma and Kewei Xu and Vincent Ji and Chu, \{Paul K.\}",

year = "2012",

month = jul,

doi = "10.1116/1.4721376",

language = "English",

volume = "30",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

AU - Wu, Guizhi

AU - Ma, Shengli

AU - Xu, Kewei

AU - Ji, Vincent

AU - Chu, Paul K.

PY - 2012/7

Y1 - 2012/7

N2 - The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K p at 1000 °C decreases to 3.36 10 -10 kg 2 m -4 s -1 when the Al concentration is increased to 30 at. % , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al 2O 3, TiO 2, and SiO 2 that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. © 2012 American Vacuum Society.

AB - The oxidation behavior of Ti-Al-Si-C-N hard coatings with different Al contents deposited on high-speed steel and Si substrates by hybrid arc-enhanced magnetron sputtering is investigated in the temperature range of 500 °C-1000 °C. The coating hardness is maintained at around 35 GPa, and the parabolic oxidation rate constant K p at 1000 °C decreases to 3.36 10 -10 kg 2 m -4 s -1 when the Al concentration is increased to 30 at. % , indicating that Ti-Al-Si-C-N coatings with larger Al concentrations have better oxidation resistance. X-ray diffraction, cross-sectional scanning electron microscopy, and x-ray photoelectron spectroscopy reveal a protective surface layer consisting of Al 2O 3, TiO 2, and SiO 2 that retards inward oxygen diffusion. A mechanism is proposed to elucidate the oxide formation. As a consequence of the good oxidation resistance, the Ti-Al-Si-C-N coatings have a large potential in high-speed dry cutting as well as other high temperature applications. © 2012 American Vacuum Society.

UR - https://www.scopus.com/pages/publications/84863682063

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84863682063&origin=recordpage

U2 - 10.1116/1.4721376

DO - 10.1116/1.4721376

M3 - RGC 21 - Publication in refereed journal

SN - 0734-2101

VL - 30

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

M1 - 41508

ER -

Oxidation resistance of quintuple Ti-Al-Si-C-N coatings and associated mechanism

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