Oxidation behavior of Ti-B-C-N coatings deposited by reactive magnetron sputtering

Xiangyang Chen; Shengli Ma; Kewei Xu; Paul K. Chu

doi:10.1016/j.vacuum.2012.03.001

Oxidation behavior of Ti-B-C-N coatings deposited by reactive magnetron sputtering

Xiangyang Chen, Shengli Ma, Kewei Xu, Paul K. Chu

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

12 Citations (Scopus)

Abstract

Quaternary Ti-B-C-N coatings with different carbon concentrations are deposited on high-speed steel substrates by reactive magnetron sputtering. The oxidation behavior between 300 and 800°C under ambient conditions is studied by scanning electron microscopy, high-resolution transmission electron microscopy, Vickers micro-hardness, and X-ray diffraction. The Ti-B-C-N coatings with smaller carbon contents have better oxidation resistance and the oxidation process can be divided into two stages: low-speed oxidation below 700°C and high-speed oxidation above 700°C. An oxidation mechanism is proposed to explain the relationship between the reaction with oxygen and observed oxidation behavior. © 2012 Elsevier Ltd. All rights reserved.

Original language	English
Pages (from-to)	1505-1512
Journal	Vacuum
Volume	86
Issue number	10
DOIs	https://doi.org/10.1016/j.vacuum.2012.03.001
Publication status	Published - 27 Apr 2012

Research Keywords

Oxidation behavior
Reactive magnetron sputtering
Ti-B-C-N coatings

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10.1016/j.vacuum.2012.03.001

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title = "Oxidation behavior of Ti-B-C-N coatings deposited by reactive magnetron sputtering",

abstract = "Quaternary Ti-B-C-N coatings with different carbon concentrations are deposited on high-speed steel substrates by reactive magnetron sputtering. The oxidation behavior between 300 and 800°C under ambient conditions is studied by scanning electron microscopy, high-resolution transmission electron microscopy, Vickers micro-hardness, and X-ray diffraction. The Ti-B-C-N coatings with smaller carbon contents have better oxidation resistance and the oxidation process can be divided into two stages: low-speed oxidation below 700°C and high-speed oxidation above 700°C. An oxidation mechanism is proposed to explain the relationship between the reaction with oxygen and observed oxidation behavior. {\textcopyright} 2012 Elsevier Ltd. All rights reserved.",

keywords = "Oxidation behavior, Reactive magnetron sputtering, Ti-B-C-N coatings",

author = "Xiangyang Chen and Shengli Ma and Kewei Xu and Chu, {Paul K.}",

year = "2012",

month = apr,

day = "27",

doi = "10.1016/j.vacuum.2012.03.001",

language = "English",

volume = "86",

pages = "1505--1512",

journal = "Vacuum",

issn = "0042-207X",

publisher = "Elsevier Ltd.",

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TY - JOUR

T1 - Oxidation behavior of Ti-B-C-N coatings deposited by reactive magnetron sputtering

AU - Chen, Xiangyang

AU - Ma, Shengli

AU - Xu, Kewei

AU - Chu, Paul K.

PY - 2012/4/27

Y1 - 2012/4/27

N2 - Quaternary Ti-B-C-N coatings with different carbon concentrations are deposited on high-speed steel substrates by reactive magnetron sputtering. The oxidation behavior between 300 and 800°C under ambient conditions is studied by scanning electron microscopy, high-resolution transmission electron microscopy, Vickers micro-hardness, and X-ray diffraction. The Ti-B-C-N coatings with smaller carbon contents have better oxidation resistance and the oxidation process can be divided into two stages: low-speed oxidation below 700°C and high-speed oxidation above 700°C. An oxidation mechanism is proposed to explain the relationship between the reaction with oxygen and observed oxidation behavior. © 2012 Elsevier Ltd. All rights reserved.

AB - Quaternary Ti-B-C-N coatings with different carbon concentrations are deposited on high-speed steel substrates by reactive magnetron sputtering. The oxidation behavior between 300 and 800°C under ambient conditions is studied by scanning electron microscopy, high-resolution transmission electron microscopy, Vickers micro-hardness, and X-ray diffraction. The Ti-B-C-N coatings with smaller carbon contents have better oxidation resistance and the oxidation process can be divided into two stages: low-speed oxidation below 700°C and high-speed oxidation above 700°C. An oxidation mechanism is proposed to explain the relationship between the reaction with oxygen and observed oxidation behavior. © 2012 Elsevier Ltd. All rights reserved.

KW - Oxidation behavior

KW - Reactive magnetron sputtering

KW - Ti-B-C-N coatings

UR - http://www.scopus.com/inward/record.url?scp=84859388220&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84859388220&origin=recordpage

U2 - 10.1016/j.vacuum.2012.03.001

DO - 10.1016/j.vacuum.2012.03.001

M3 - RGC 21 - Publication in refereed journal

SN - 0042-207X

VL - 86

SP - 1505

EP - 1512

JO - Vacuum

JF - Vacuum

IS - 10

ER -

Oxidation behavior of Ti-B-C-N coatings deposited by reactive magnetron sputtering

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