Oxidation behavior of Ru–Al multilayer coatings

Ru_0.63Al_0.37 coatings were deposited through a cyclical gradient concentration deposition at 400 °C with a substrate-holder rotation speed of 1 rpm by direct current magnetron cosputtering. Scanning electron microscopy revealed that the as-deposited coatings exhibited a multilayer structure along with the columnar structure. The oxidation behavior of the Ru_0.63Al_0.37 coatings was examined through X-ray diffraction, Auger electron spectroscopy, transmission electron microscopy, and X-ray photoelectron spectroscopy. Oxidation kinetics was measured using a thermogravimetric analyzer. Internal oxidation was observed for Ru_0.63Al_0.37 coatings annealed in a 1% O₂–99% Ar atmosphere at 400–600 °C accompanied with activation energies of 72–84 kJ/mol. By contrast, external oxidation was observed after annealing at 700–800 °C, resulting in the formation of a continuous alumina scale consisting of crystalline δ-Al₂O₃ domains, which can be attributable to the outward diffusion of Al.