Oscillating growth of surface roughness in multilayer films

Z. J. Liu; Y. G. Shen

doi:10.1063/1.1764598

Oscillating growth of surface roughness in multilayer films

Z. J. Liu, Y. G. Shen

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

23 Citations (Scopus)

Abstract

The surface and interface roughness of binary multilayer films were studied using a continuum model. It was found that the surface roughness of a multilayer film was a result of the competition between the growth-induced roughening at one type of interface and the roughness smoothning at another type of interface. The oscillating feature of the roughness growth of multilayer films gave a deep insight into the experimental observations. The surface roughness of a multilayer film was found to exhibit an exponential dependence on the growth time and the scaling law found in the growth of single-layer films was also valid for multilayers.

Original language	English
Pages (from-to)	5121-5123
Journal	Applied Physics Letters
Volume	84
Issue number	25
DOIs	https://doi.org/10.1063/1.1764598
Publication status	Published - 21 Jun 2004

Access Output

10.1063/1.1764598

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@article{9ed5a7bcf4574f97b3960a05034298b5,

title = "Oscillating growth of surface roughness in multilayer films",

abstract = "The surface and interface roughness of binary multilayer films were studied using a continuum model. It was found that the surface roughness of a multilayer film was a result of the competition between the growth-induced roughening at one type of interface and the roughness smoothning at another type of interface. The oscillating feature of the roughness growth of multilayer films gave a deep insight into the experimental observations. The surface roughness of a multilayer film was found to exhibit an exponential dependence on the growth time and the scaling law found in the growth of single-layer films was also valid for multilayers.",

author = "Liu, {Z. J.} and Shen, {Y. G.}",

year = "2004",

month = jun,

day = "21",

doi = "10.1063/1.1764598",

language = "English",

volume = "84",

pages = "5121--5123",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "25",

}

TY - JOUR

T1 - Oscillating growth of surface roughness in multilayer films

AU - Liu, Z. J.

AU - Shen, Y. G.

PY - 2004/6/21

Y1 - 2004/6/21

N2 - The surface and interface roughness of binary multilayer films were studied using a continuum model. It was found that the surface roughness of a multilayer film was a result of the competition between the growth-induced roughening at one type of interface and the roughness smoothning at another type of interface. The oscillating feature of the roughness growth of multilayer films gave a deep insight into the experimental observations. The surface roughness of a multilayer film was found to exhibit an exponential dependence on the growth time and the scaling law found in the growth of single-layer films was also valid for multilayers.

AB - The surface and interface roughness of binary multilayer films were studied using a continuum model. It was found that the surface roughness of a multilayer film was a result of the competition between the growth-induced roughening at one type of interface and the roughness smoothning at another type of interface. The oscillating feature of the roughness growth of multilayer films gave a deep insight into the experimental observations. The surface roughness of a multilayer film was found to exhibit an exponential dependence on the growth time and the scaling law found in the growth of single-layer films was also valid for multilayers.

UR - http://www.scopus.com/inward/record.url?scp=3142742329&partnerID=8YFLogxK

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-3142742329&origin=recordpage

U2 - 10.1063/1.1764598

DO - 10.1063/1.1764598

M3 - RGC 21 - Publication in refereed journal

SN - 0003-6951

VL - 84

SP - 5121

EP - 5123

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 25

ER -

Oscillating growth of surface roughness in multilayer films

Abstract

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this