Oriented single-crystal diamond cones and their arrays

W. J. Zhang; X. M. Meng; C. Y. Chan; Y. Wu; I. Bello; S. T. Lee

doi:10.1063/1.1568546

Oriented single-crystal diamond cones and their arrays

W. J. Zhang
, X. M. Meng
, C. Y. Chan
, Y. Wu
, I. Bello
, S. T. Lee

Centre of Super-Diamond and Advanced Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

65 Citations (Scopus)

Abstract

Bias-assisted reactive ion etching in hydrogen plasma was used for the development of a conical structure of diamond. The diamond cones produced by this method were uniformly distributed over large areas on silicon substrates. Such kinds of structures individual single crystal diamond cones and their arrays provide a crucial breakthrough in the design of high performance mechanical and electronic devices.

Original language	English
Pages (from-to)	2622-2624
Journal	Applied Physics Letters
Volume	82
Issue number	16
DOIs	https://doi.org/10.1063/1.1568546
Publication status	Published - 21 Apr 2003

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title = "Oriented single-crystal diamond cones and their arrays",

abstract = "Bias-assisted reactive ion etching in hydrogen plasma was used for the development of a conical structure of diamond. The diamond cones produced by this method were uniformly distributed over large areas on silicon substrates. Such kinds of structures individual single crystal diamond cones and their arrays provide a crucial breakthrough in the design of high performance mechanical and electronic devices.",

author = "Zhang, \{W. J.\} and Meng, \{X. M.\} and Chan, \{C. Y.\} and Y. Wu and I. Bello and Lee, \{S. T.\}",

year = "2003",

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language = "English",

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T1 - Oriented single-crystal diamond cones and their arrays

AU - Zhang, W. J.

AU - Meng, X. M.

AU - Chan, C. Y.

AU - Wu, Y.

AU - Bello, I.

AU - Lee, S. T.

PY - 2003/4/21

Y1 - 2003/4/21

N2 - Bias-assisted reactive ion etching in hydrogen plasma was used for the development of a conical structure of diamond. The diamond cones produced by this method were uniformly distributed over large areas on silicon substrates. Such kinds of structures individual single crystal diamond cones and their arrays provide a crucial breakthrough in the design of high performance mechanical and electronic devices.

AB - Bias-assisted reactive ion etching in hydrogen plasma was used for the development of a conical structure of diamond. The diamond cones produced by this method were uniformly distributed over large areas on silicon substrates. Such kinds of structures individual single crystal diamond cones and their arrays provide a crucial breakthrough in the design of high performance mechanical and electronic devices.

UR - https://www.scopus.com/pages/publications/0037545951

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0037545951&origin=recordpage

U2 - 10.1063/1.1568546

DO - 10.1063/1.1568546

M3 - RGC 21 - Publication in refereed journal

SN - 0003-6951

VL - 82

SP - 2622

EP - 2624

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 16

ER -

Oriented single-crystal diamond cones and their arrays

Abstract

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